Tool having CVD coating

ABSTRACT

A tool having a base body of carbide, cermet, ceramic, steel or high speed steel and a single-layer or multi-layer wear-protection coating applied thereto in a CVD process, wherein the wear-protection coating has at least one Ti 1-x Al x C y N z  layer having stoichiometry coefficients 0.70≤x&lt;1.0≤y&lt;0.25 and 0.75≤z&lt;1.15 wherein the Ti 1-x Al x C y N z  layer is of a thickness of 1 μm to 25 μm and has a crystallographic preferential orientation, which is characterized by a ratio of the intensities of the X-ray diffraction peaks of the crystallographic {111} plane and the {200} plane, wherein I{111}/I{200}&gt;1+h (ln h) 2 , wherein h is the thickness of the Ti 1-x Al x C y N z  layer in micrometer.

The present application is a U.S. National Phase Application of International Application No. PCT/EP2014/057720, filed 16 Apr. 2014, which claims priority to German Application No. 10 2013 104 254.6, filed 26 Apr. 2013.

The invention concerns a tool having a base body of carbide, cermet, ceramic, steel or high speed steel and a single-layer or multi-layer wear-protection coating applied thereto in a CVD process, wherein the wear-protection coating has at least one Ti_(1-x)Al_(x)C_(y)N_(z) layer having stoichiometry coefficients 0.70≤x<1, 0≤y<0.25 and 0.75≤z<1.15, and with a crystallographic preferential orientation. The invention further concerns a process for the production of such a tool.

BACKGROUND OF THE INVENTION

Cutting inserts for material machining, in particular for cutting metal machining, comprise a substrate body of carbide, cermet, ceramic, steel or high speed steel which in most cases is provided with a single-layer or multi-layer carbide coating for improving the cutting and/or wearing properties. The carbide coating comprises mutually superposed layers of monometallic or mixed-metallic carbide phases. Examples of monometallic carbide phases are TiN, TiC, TiCN and Al₂O₃. Examples of mixed-metallic phases in which in a crystal one metal is partially replaced by another are TiAlN and TiAlCN. Coatings of the above-indicated kind are applied by CVD processes (chemical vapour phase deposit), PCVD processes (plasma-assisted CVD processes) or PVD processes (physical vapour phase deposit).

It has been found that certain preferential orientations of crystal growth in the deposit in the PVD or CVD process can have particular advantages, in which respect different preferential orientations of given layers of a coating can also be particularly advantageous for different uses of the cutting insert. The preferential orientation of growth is generally specified in relation to the plane of the crystal lattice, defined by way of the Miller index and is referred to as the crystallographic texture (for example fibre texture).

DE 10 2005 032 860 discloses a carbide coating with a layer of cubically face-centred T_(1-x)Al_(x)C_(y)N_(z) with an Al content of 0.75≤z<0.93 and a process for the production thereof.

DE 10 2007 000 512 discloses a carbide coating with a layer of TiAlN which is deposited on a first layer of TiN, TiCN or TiC deposited directly on the substrate, and a bonding layer provided between the two layers, with a phase gradient. The layer of TiAlN has a preferential orientation of crystal growth with respect to the (200) plane of the crystal lattice.

Laid-open specifications WO 2009/112115, WO 2009/112116 and WO 2009/112117A1 disclose TiAlN and TiAlCN layers deposited by means of CVD processes with a high Al proportion and a cubically face-centred lattice, but no crystallographic preferential orientations of crystal growth are described.

TiAlN coatings produced by means of PVD processes, with various crystallographic preferential orientations of crystal growth, are known, but PVD coatings with cubically face-centred lattices of the TiAlN coatings, in contrast to CVD coatings are restricted to Al contents of less than 67%. TiAlN coatings with a crystallographic preferential orientation of the {200} plane with respect to the growth direction of the crystallites are described as advantageous for metal machining (for example US 2009/0274899, US 2009/0074521 and WO 2009/127344).

OBJECT

The object of the present invention was to provide cutting inserts for cutting metal machining, in particular turning and milling machining of steel or cast materials, which have improved wear resistance over the state of the art.

DESCRIPTION OF THE INVENTION

That object is attained by a process for the production of a tool having a base body of carbide, cermet, ceramic, steel or high speed steel and a single-layer or multi-layer wear-protection coating applied thereto in a CVD process, wherein the wear-protection coating has at least one Ti_(1-x)Al_(x)C_(y)N_(z) layer having stoichiometry coefficients 0.70≤x<1, 0≤y<0.25 and 0.75≤z<1.15 and of a thickness in the range of 1 μm to 25 μm, wherein for production of the Ti_(1-x)Al_(x)C_(y)N_(z) layer

a) the bodies to be coated are placed in a substantially cylindrical CVD reactor designed for an afflux flow on the bodies to be coated with the process gases in a direction substantially radially relative to the longitudinal axis of the reactor,

b) two precursor gas mixtures (VG1) and (VG2) are provided, wherein the first precursor gas mixture (VG1) contains

0.005% to 0.2 vol-% TiCl₄,

0.025% to 0.5 vol-% AlCl₃ and

as a carrier gas hydrogen (H₂) or a mixture of hydrogen and nitrogen (H₂/N₂), and the second precursor gas mixture (VG2) contains

0.1 to 3.0 vol-% of at least one N-donor selected from ammonia (NH₃) and hydrazine (N₂H₄), and

as a carrier gas hydrogen (H₂) or a mixture of hydrogen and nitrogen (H₂/N₂), and the first precursor gas mixture (VG1) and/or the second precursor gas mixture (VG2) optionally contains a C-donor selected from acetonitrile (CH₃CN), ethane (C₂H₆), ethene (C₂H₄) and ethyne (C₂H₂) and mixtures thereof, wherein the total vol-% proportion of N-donor and C-donor in the precursor gas mixtures (VG1, VG2) is in the range of 0.1 to 3.0 vol-%,

c) the two precursor gas mixtures (VG1, VG2) are kept separate before passing into the reaction zone and are introduced substantially radially relative to the longitudinal axis of the reactor at a process temperature in the CVD reactor in the range of 600° C. to 850° C. and a process pressure in the CVD reactor in the range of 0.2 to 18 kPa,

wherein the ratio of the volume gas flows ({dot over (V)}) of the precursor gas mixtures (VG1, VG2) {dot over (V)}(VG1)/{dot over (V)}(VG2) is less than 1.5.

In accordance with the present invention vol-% proportions in the precursor gas mixtures relate to the total volume of the gas mixture introduced into the reaction zone and comprising the first and second precursor gas mixtures.

It was surprisingly found that the process implementation according to the invention makes it possible to produce Ti_(1-x)Al_(x)C_(y)N_(z) and Ti_(1-x)Al_(x)N_(z) layers with stoichiometry coefficients 0.70≤x<1, 0<y<0.25 and 0.75≤z<1.15 and with a cubically face-centred lattice, which have a pronounced preferential orientation of crystal growth with respect to the {111} plane of the crystal lattice. In comparison with known coatings with TiAlCN and TiAlN layers, in particular those with preferential orientation of crystal growth with respect to the {200} plane of the crystal lattice, the coatings according to the invention have outstanding properties in metal machining. It was further surprisingly found that, in the case of a cutting insert with a coating of the kind described herein, in cutting metal machining, in particular in turning and milling of steel or cast materials, it is possible to achieve a wear resistance which is improved over known cutting inserts and a wider range of applications.

In the CVD process according to the invention two precursor gas mixtures (VG1) and (VG2) are prepared, wherein the first precursor gas mixture (VG1) contains the metals Ti and Al in the form of their chlorides and carrier gas and the second precursor gas mixture (VG2) contains at least one N-donor. In general only N-donor ammonia (NH₃) or hydrazine (N₂H₄) is used for the production of a pure TiAlN layer. For the production of the TiAlCN layer N-donor and C-donor are used, for example ammonia (NH₃) mixed with ethene (C₂H₄). In the process according to the invention acetonitrile (CH₃CN) acts predominantly as a C-donor and is accordingly used in the mixture with an N-donor. Depending on the respectively desired stoichiometry it is possible to use mixtures with further N-donors and C-donors. For the process according to the invention it is necessary for the N-donor to be supplied separately from the chlorides of the metals Ti and Al, but in contrast the C-donor can be supplied both by way of the first precursor gas mixture (VG1) and also by way of the second precursor gas mixture (VG2). In a further preferred embodiment of the invention the N-donor is ammonia (NH₃).

The CVD process used according to the invention is an MT-CVD process at a process temperature in the CVD reactor in the range of 600° C. to 850° C. and a process pressure in the range of 0.2 to 18 kPa. The CVD reactor is a substantially cylindrical reactor which is designed for an afflux flow to the bodies to be coated with the process gases in a direction substantially radially relative to the longitudinal axis of the reactor, that is to say from the central axis of the cylindrical reactor in the direction of the outer walls of the reactor, that are formed by the cylinder casing. Such cylindrical reactors are known and commercially available, for example the CVD coating systems of type Bernex®BPXpro from lonbond AG, Olten, Switzerland.

An essential process step in the process according to the invention is that the two precursor gas mixtures (VG1) and (VG2) are kept separate prior to passing into the reaction zone. If that is not done the precursor gas flows can already react excessively early, for example in the supply lines, and the desired coating is not achieved.

A further essential step in the process according to the invention provides that the ratio of the volume gas flows ({dot over (V)}) of the precursor gas mixtures (VG1, VG2) {dot over (V)}(VG1)/{dot over (V)}(VG2) is less than 1.5. If the ratio of the volume gas flows ({dot over (V)}) of the precursor gas mixtures (VG1, VG2) {dot over (V)}(VG1)/{dot over (V)}(VG2) is greater than 1.5 that does not give the desired properties for the Ti_(1-x)Al_(x)C_(y)N_(z) layer, in particular not the preferential orientation of crystal growth with respect to the {111} plane of the crystal lattice, which herein is defined as the ratio of the intensities of the X-ray diffraction peaks I{111}/I{200} and according to the invention is to be >1+h (ln h)², wherein h is the thickness of the Ti_(1-x)Al_(x)C_(y)N_(z) layer in ‘μm’.

In a preferred embodiment of the invention the process temperature in the CVD reactor is in the range of 650° C. to 800° C., preferably in the range of 657° C. to 750° C.

If the process temperature in the CVD reactor is too high contents of hexagonal AlN are obtained in the layer, whereby inter alia the layer hardness falls.

If the process temperature in the CVD reactor in contrast is too low the deposit rate can drop into an uneconomical range. In addition at low temperatures layers with chlorine contents >1 at-% and of lower hardness are obtained.

In a further preferred embodiment of the invention the process pressure in the CVD reactor is in the range of 0.2 to 7 kPa, preferably in the range of 0.4 to 1.8 kPa.

If the process pressure in the CVD reactor is too high that leads to an irregular layer thickness distribution on the tools with increased layer thickness at the edges, the so-called dog bone effect. In addition high proportions of hexagonal AlN are frequently obtained.

A process pressure in the CVD reactor of less than 0.2 kPa in contrast is technically difficult to implement. In addition at an excessively low process pressure uniform coating of the tools is no longer guaranteed.

In a further preferred embodiment of the invention the ratio of the volume gas flows ({dot over (V)}) of the precursor gas mixtures (VG1, VG2) {dot over (V)}(VG1)/{dot over (V)}(VG2) is less than 1.25, preferably less than 1.5.

If the ratio of the volume gas flows ({dot over (V)}) of the precursor gas mixtures (VG1, VG2) is too high a preferential orientation other than the {111} preferential orientation according to the invention is generally attained.

In a further preferred embodiment of the invention the concentration of TiCl₄ in the precursor gas mixture (VG1) and the concentration of N-donor in the precursor gas mixture (VG2) are so set that the molar ratio of Ti to N in the volume gas flows {dot over (V)}(VG1) and {dot over (V)}(VG2) introduced into the reactor in stage c) is ≤0.25.

It was surprisingly found that, with a higher molar ratio of Ti to N the volume gas flows {dot over (V)}(VG1) and {dot over (V)}(VG2) introduced into the reactor contains highly Ti-rich layers, in particular when using ammonia (NH₃) as the N-donor. It is assumed that with an excessively high ratio of Ti to N in the volume gas flows the reaction of the AlCl₃ is depressed by virtue of complexing between TiCl₄ and the N-donor.

In a further preferred embodiment of the invention the second precursor gas mixture (VG2) contains ≤1.0 vol-%, preferably ≤0.6 vol-% of the N-donor.

If the concentration of the N-donor, optionally mixed with C-donor, is excessively high in the second precursor gas mixture (VG2) the desired composition and crystallographic preferential orientation is not achieved.

In a further preferred embodiment of the invention the wear-protection coating is subjected to a blasting treatment with a particulate blasting agent, preferably corundum, under conditions such that the Ti_(1-x)Al_(x)C_(y)N_(z) layer after the blasting treatment has residual stresses in the range of +300 to −5000 MPa, preferably in the range of −1 to −3500 MPa.

If the residual compressive strength of the Ti_(1-x)Al_(x)C_(y)N_(z) layer is too high that can involve spalling of the coating at the edges of the tool.

If in contrast there are residual tensile stresses in the Ti_(1-x)Al_(x)C_(y)N_(z) layer then optimum resistance of the tool to an alternating thermomechanical loading or in relation to the formation of comb cracks is not achieved.

Dry or wet blasting treatment can advantageously be used for producing the preferred residual stresses in the Ti_(1-x)Al_(x)C_(y)N_(z) layer. The blasting treatment is desirably performed at a blasting agent pressure of 1 bar to 10 bars.

The duration of the blasting treatment and the required blasting pressure, required for introducing the residual stresses according to the invention, are parameters which the man skilled in the art can ascertain within the limits defined herein by simple experiments. A broad sweeping specification is not possible here as the residual stresses which occur depend not only on the duration of the blasting treatment and the blasting pressure but also the structure and the thickness of the overall coating. It will be noted however in that respect that, in comparison with the blasting duration, the blasting pressure has a substantially greater influence on the change in the residual stresses in the coating and the substrate body. Suitable blasting treatment durations are usually in the range of 10 to 600 seconds.

The blasting angle, that is to say the angle between the treatment jet and the surface of the tool, also has a substantial influence on the introduction of residual stresses. With a blasting jet angle of 90° maximum introduction of residual compression stresses occurs. Lower blasting jet angles, that is to say applying the jet of blasting agent at an inclined angle, lead to more severe abrasion of the surface and lower introduction of residual compressive stress.

The invention also embraces a tool having a base body of carbide, cermet, ceramic, steel or high speed steel and a single-layer or multi-layer wear-protection coating applied thereto in a CVD process, wherein the wear-protection coating has at least one Ti_(1-x)Al_(x)C_(y)N_(z) layer having stoichiometry coefficients 0.70≤x<1, 0≤y<0.25 and 0.75≤z<1.15 characterised in that

the Ti_(1-x)Al_(x)C_(y)N_(z) layer is of a thickness of 1 μm to 25 μm and has a crystallographic preferential orientation, which is characterised by a ratio of the intensities of the X-ray diffraction peaks of the crystallographic {111} plane and the {200} plane, wherein I{111}/I{200}>1+h (ln h)², wherein h is the thickness of the Ti_(1-x)Al_(x)C_(y)N_(z) layer in ‘μm’.

In a preferred embodiment of the invention the full-width half-maximum (FWHM) of the X-ray diffraction peak of the {111} plane of the Ti_(1-x)Al_(x)C_(y)N_(z) layer <1%, preferably <0.6%, particularly preferably <0.45%.

An excessively high full-width half-maximum of the X-ray diffraction peak of the {111} plane of the Ti_(1-x)Al_(x)C_(y)N_(z) layer points to smaller grain sizes of the cubically face-centred (fcc) phase or even to proportions of amorphous phases. That has proven in previous tests to be disadvantageous in terms of wear resistance.

In a further preferred embodiment of the invention the Ti_(1-x)Al_(x)C_(y)N_(z) layer has at least 90 vol-% Ti_(1-x)Al_(x)C_(y)N_(z) phase with a cubically face-centred (fcc) lattice, preferably at least 95 vol-% Ti_(1-x)Al_(x)C_(y)N_(z) phase with cubically face-centred (fcc) lattice, particularly preferably at least 98 vol-% Ti_(1-x)Al_(x)C_(y)N_(z) phase with cubically face-centred (fcc) lattice.

If the proportion of Ti_(1-x)Al_(x)C_(y)N_(z) phase with cubically face-centred (fcc) lattice is too low a lower level of wear resistance is observed.

In a further preferred embodiment of the invention the Ti_(1-x)Al_(x)C_(y)N_(z) layer has stoichiometry coefficients 0.70≤x<1, y=0 and 0.95≤z<1.15.

In a further preferred embodiment of the invention the Ti_(1-x)Al_(x)C_(y)N_(z) layer is of a thickness in the range of 3 μm to 20 μm, preferably in the range of 4 to 15 μm.

If the thickness of the Ti_(1-x)Al_(x)C_(y)N_(z) layer is too small the wear resistance of the tool is not adequate.

If in contrast the thickness of the Ti_(1-x)Al_(x)C_(y)N_(z) layer is too high spalling of the layer can occur by virtue of the thermal residual stresses after the coating operation.

In a further preferred embodiment of the invention the ratio of the intensities of the X-ray diffraction peaks of the crystallographic {111} plane and the {200} plane of the Ti_(1-x)Al_(x)C_(y)N_(z) layer >1+(h+3)x(ln h)².

In a further preferred embodiment of the invention the Ti_(1-x)Al_(x)C_(y)N_(z) layer has a Vickers hardness (HV)>2300 HV, preferably >2750 HV, particularly preferably >3000 HV.

In a further preferred embodiment of the invention arranged between the base body and the Ti_(1-x)Al_(x)C_(y)N_(z) layer is at least one further hard material layer selected from a TiN layer, a TiCN layer deposited by means of high temperature CVD (CVD) or medium temperature CVD (MT-CVD), an Al₂O₃ layer and combinations thereof. It is particularly preferred if the further layers are applied in the same temperature range, for example by medium temperature CVD (MT-CVD) as the Ti_(1-x)Al_(x)C_(y)N_(z) layer in order to avoid uneconomical cooling times.

In a further preferred embodiment of the invention arranged over the Ti_(1-x)Al_(x)C_(y)N_(z) layer is at least one further hard material layer, preferably at least one Al₂O₃ layer of the modification γ-Al₂O₃, κ-Al₂O₃ or α-Al₂O₃, wherein the Al₂O₃ layer is deposited by means of high temperature CVD (CVD) or medium temperature CVD (MT-CVD). It is particularly preferred for the aluminium oxide layer for the above-specified reasons to be applied in the same temperature range, that is to say by medium temperature CVD (MT-CVD) as the Ti_(1-x)Al_(x)C_(y)N_(z) layer to avoid possible phase conversions of the Ti_(1-x)Al_(x)C_(y)N_(z) layer. Processes for the production of γ-Al₂O₃, κ-Al₂O₃ or α-Al₂O₃ layers in the range of 600 to 850° C. are known to the man skilled in the art, for example from EP 1 122 334 and EP 1 464 727.

In a further preferred embodiment the crystallographic preferential orientation of the {111} plane of the fcc Ti_(1-x)Al_(x)C_(y)N_(z) layer is so pronounced that the absolute maximum, measured radiographically or by means of EBSD, of the {111} intensity of the fcc Ti_(1-x)Al_(x)C_(y)N_(z) layer is within an angle range of α=±10°, preferably within α=±5°, particularly preferably within α=±1°, starting from the normal direction of the sample surface. What is crucial in that respect is the section through the {111} pole figure of the fcc Ti_(1-x)Al_(x)C_(y)N_(z) after integration of the intensities over the azimuth angle β (angle of rotation about the sample surface normal).

DESCRIPTION OF THE FIGURES

FIG. 1 shows a cutting edge of an indexable cutting bit with coating No 9 according to the state of the art after a turning trial,

FIG. 2 shows a cutting edge of an indexable cutting bit with coating No 8 according to the state of the art after a turning trial,

FIG. 3 shows a cutting edge of an indexable cutting bit with Ti_(1-x)Al_(x)C_(y)N_(z) coating No 1 according to the invention after a turning trial,

FIG. 4 shows the X-ray diffractogram of coating No 4 (invention),

FIG. 5 shows the X-ray diffractogram of coating No 8 (state of the art),

FIG. 6 shows an inverse pole figure for the normal direction of coating No 1 (invention),

FIG. 7 shows a section through the pole figure of the X-ray diffractogram after integration over β of coating No 1 (invention), and

FIG. 8 shows a section through the pole figure of the X-ray diffractogram after integration over β of coating No 2 (invention).

EXAMPLES

Production of Coated Carbide Indexable Cutting Bits

In these examples the substrate bodies used are carbide indexable cutting bits of the geometry CNMAl20412 with a composition of 86.5 wt-% WC, 5.5 wt-% Co, 2 wt-% TiC, 6 wt-% (NbC+TaC) and with a mixed-carbide-free edge zone.

For coating the carbide indexable cutting bits a CVD coating installation of the type Bernex BPX325S of a reactor height of 1250 mm and a reactor diameter of 325 mm was used. The gas flow was radially relative to the longitudinal axis of the reactor.

For bonding the Ti_(1-x)Al_(x)C_(y)N_(z) layers according to the invention and the comparative layers a TiN layer or TiCN layer approximately 0.3 μm in thickness was firstly directly applied to the carbide substrate by means of CVD under the deposit conditions set out in Table 1.

TABLE 1 Reaction conditions in the production of bonding layers Reactive gas mixture Temp. Pressure [vol -%] Bonding layer [° C.] [kPA] TiCl₄ N₂ H₂ CH₃CN TiN 850 15 0.8 44.1 55.1 — TiCN 830 6 1.0 37.0 61.7 0.3

To produce the Ti_(1-x)Al_(x)C_(y)N_(z) layers according to the invention a first precursor gas mixture (VG1) with the starting compounds TiCl₄ and AlCl₃ and a second precursor gas mixture (VG2) with the starting compound NH₃ as the reactive nitrogen compound were introduced into the reactor separately from each other so that mixing of the two gas flows took place only upon passing into the reaction zone.

The volume gas flows of the precursor gas mixtures (VG1) and (VG2) were so set that in production of coatings according to the invention the ratio of the volume gas flows {dot over (V)}(VG1)/{dot over (V)}(VG2) was less than 1.5. The parameters in the production of Ti_(1-x)Al_(x)C_(y)N_(z) coatings according to the invention and comparative coatings are reproduced in Table 3.

Production of Comparative Coatings

Carbide indexable cutting bits as further comparative examples in accordance with the state of the art, were coated with:

a) a 12 μm thick layer system of the sequence TiN/MT-Ti (C,N)/TiN (coating No 9), and

b) a 5 μm thick layer system of the sequence TiN/MT-Ti (C,N) (coating No 10). The deposit conditions in accordance with Table 2 hereinafter were used for that purpose:

TABLE 2 Reaction conditions in the production of coatings Nos 9 and 10 (comparative) Reactive gas mixture Temp. Pressure Time [vol -%] Thickness Layers [° C.] [kPA] [min] TiCl₄ N₂ H₂ CH₃CN [μm] Coating No 9 TiN 910 16 60 1.1 39.6 59.4 — 0.5 MT-TiCN 890 12 220 1.8 10.7 85.9 0.9 11 TiN 920 80 50 0.8 22.4 76.8 — 0.5 Coating No 10 TiN 910 16 30 1.1 39.6 59.4 — 0.2 MT-TiCN 870 9 105 1.8 10.7 85.9 0.9 4.8

The following methods were used for the investigation of composition, texture, residual stresses and hardness of the coatings.

Both methods of X-ray diffraction (XRD) and also electron diffraction, in particular EBSD, can be used for determining the crystallographic preferential orientation. For the purposes of reliably determining a preferential orientation diffraction measurements at reflections of individual surfaces {hkl} are not appropriate, but the orientation density function (ODF) has to be ascertained. The representation thereof in the form of an inverse pole figure shows the position and sharpness of any fibre texture that may be present. The orientation density function either has to be constructed from a statistically adequate number of individual orientation measurements (in the case of EBSD) or calculated from measurements of a minimum number of pole figures at various reflections {hkl} (with XRD). See in that respect: L Spiess et al, Moderne Rontgenbeugung, 2nd edition, Vieweg & Teubner, 2009.

In the case of the Ti_(1-x)Al_(x)C_(y)N_(z) layers according to the invention XRD measurement of a pole figure set and ODF calculation were used to verify that a fibre structure is involved, with a fibre axis either precisely in the <111> direction or in a crystallographic direction with <10° angular deviation from <111>. The intensity ratio of the {111} and {200} reflections from θ-2θ measurements can be used for quantifying that texture. The position of the fibre axis can be ascertained from the inverse pole figure or the radiographically measured pole figure of the {111} reflection.

X-Ray Diffractometry

X-ray diffraction measurements were implemented on a diffractometer of type GE Sensing & Inspection Technologies PTS3003 using CuKα radiation. For θ-2θ residual stress and pole figure measurements a parallel beam optical system was used, which at the primary side comprised a polycapillary means and a 2 mm pinhole as a collimator. At the secondary side a parallel plate collimator with 0.4° divergence and a nickel K_(β) filter was used.

Peak intensities and full-width half-maximums were determined on the basis of θ-2θ measurements. After deduction of the background pseudo-Voigt functions were fitted to the measurement data, wherein the Kα₂ deduction was effected by means of Kα₁/Kα₂ doublet matching. The values in respect of intensities and full-width half-maximums set out in Table 4 relate to the Kα₁ interferences fitted in that way. The lattice constants are calculated in accordance with Vegard's law on the assumption of the lattice constants of TiN and AlN from PDF-cards 38-1420 and 46-1200 respectively.

Distinguishing Between Cubically Face-Centred (Fcc) Ti_(1-x)Al_(x)C_(y)N_(z) and Hexagonal AlN

The {101} and {202} interferences of hexagonal AlN and the {111} and {222} reflection of cubic XTi_(1-x)Al_(x)C_(y)N_(z) can be mutually superposed to a greater or lesser degree depending on the respective chemical composition. Only the interference of the {200} plane of the cubic Ti_(1-x)Al_(x)C_(y)N_(z) is superposed by no further interferences, like for example by the substrate body or layers arranged thereabove or therebelow, and has the highest intensity for random orientation.

For judging the volume proportion of hexagonal AlN in the measurement volume and for avoiding misinterpretations in respect of the {111} and {200} intensities of the cubic Ti_(1-x)Al_(x)C_(y)N_(z) measurements (0-20 scans) were carried out at two different tilt angles ψ (ψ=0° and ψ=54.74°). As the angle between the plane normals of {111} and {200} is about 54.74° there is an intensity maximum of the {200} reflection at the tilt angle ψ=54.74° in the case of a strong {111} fibre texture while the intensity of the {111} reflection tends towards zero. Conversely with the tilt angle ψ=54.74° there is a strong intensity maximum of the {111} reflection with a strong {200} fibre texture while the intensity of the {200} reflection tends towards zero.

For the textured layers produced in accordance with the examples it is possible in that way to check whether the measured intensity at 2θ≈38.1° is to be predominantly associated with the cubically face-centred Ti_(1-x)Al_(x)C_(y)N_(z) phase or whether greater proportions of hexagonal AlN are contained in the layer. Both X-ray diffraction measurements and also EBSD measurements identically show only small proportions of hexagonal AlN phase in the layers according to the invention.

Pole Figures

Pole figures of the {111} reflection were implemented at 2θ=38.0° over an angle range of 0°<α<75° (increment 5°) and 0°<β<360° (increment 5°) with a circular arrangement of the measurement points. The intensity distribution of all measured and back-calculated pole figures was approximately rotationally symmetrical, that is to say the layers investigated exhibited fibre textures. For checking the preferential orientation pole figures were measured in addition to the {111} pole figure at the {200} and {220} reflections. The orientation density distribution function (ODF) was calculated with the software LaboTex3.0 from LaboSoft, Poland, and the preferential orientation represented as an inverse pole figure. With the layers according to the invention the intensity maximum was in the <111> direction or ≤10° angle deviation from <111>.

Residual Stress Analyses

For residual stress analyses in accordance with the sin²ψ method the {222} interference of the cubically face-centred Ti_(1-x)Al_(x)C_(y)N_(z) layer was used and measurements were made at 25 ψ angles of −60° to 60° (increment 5°). After background deduction, Lorentz polarisation correction and Kα₂ deduction (Rachinger separation) the line positions of the interferences were determined by means of adaptation of profile functions to the measurement data. The elastic constants used were ½s₂=1.93 TPa⁻¹ and s₂=−0.18 TPa⁻¹. The residual stress in the WC phase of the carbide substrate was determined in the same manner on the basis of the {201} interference using the elastic constants ½s₂=1.66 TPa⁻¹ and s₁=−0.27 TPa⁻¹.

Residual stresses are usually specified in the unit Megapascal (MPa), in which respect residual tensile stresses are identified by a positive sign (+) and residual compressive stresses with a negative sign (−).

EDX Measurements (Energy-Dispersive X-Ray Spectroscopy)

EDX measurements were carried out on a scanning electron microscope Supra 40 VP from Carl Zeiss with 15 kV acceleration voltage with an EDX spectrometer type INCA x-act from Oxford Instruments, UK.

Microhardness Determination

Measurement of microhardness was effected in accordance with DIN EN ISO 14577-1 and −4 with a universal hardness tester of type Fischerscope H100 from Helmut Fischer GmbH, Sindelfingen, Germany, on a polished section of the coated bodies.

Blasting Treatment

The carbide indexable cutting bits coated in the examples were subjected after the CVD coating operation to a compressed air dry jet blasting treatment. The residual stresses in the Ti_(1-x)Al_(x)C_(y)N_(z) layer and in the substrate (WC) were measured prior to and after the blasting treatment. The jet blasting parameters used and the measured residual stress values are set forth in Table 5.

TABLE 3 Deposit conditions Ti_(1−x)Al_(x)C_(y)N_(z)-Lage Deposit conditions Ti_(1−x)Al_(x)C_(y)N_(z)-Layer Ratio Precursor volume Precursor gas gas mixture gas flows Thickness Coating Bonding Temp. Pressure Time mixture [vol-%] VG2 [vol-%] {dot over (V)} (VG1)/{dot over (V)} Ti_(1−x)Al_(x)C_(y)N_(z) No layer [° C.] [kPa] [min] H₂ N₂ TiCl₄ AlCl₃ CH₃CN H₂ N₂ NH₃ (VG2) [μm] 1 (Inv) TiN 700 1 260 40.88 — 0.08 0.32 0 36.56 21.2 0.96 0.7 12 2 (Inv) TiN 700 1 260 54.35 — 0.03 0.25 0 45.00 — 0.37 1.2 6 3 (Inv) TiN 700 1 260 53.33 — 0.06 0.25 0 27.95 16.2 2.21 1.2 11 4 (Inv) TiN 700 1.2 360 52.69 — 0.02 0.16 0 46.90 — 0.23 1.1 11 5 (Inv) TiN 700 1.2 180 52.69 — 0.02 0.16 0 46.90 — 0.23 1.1 4.5 6 (Inv) TiN 670 1.2 300 52.69 — 0.02 0.16 0 46.90 — 0.23 1.1 5 7 (Inv) TiCN 720 1.2 150 52.69 — 0.02 0.16 0.1 46.79 — 0.23 1.1 4 8 (Comp) TiN 700 1 260 68.45 — 0.08 0.31 0 28.33 — 2.83 2.2 12

TABLE 4 X-ray diffraction data and elementary compositions of the Ti_(1−x)Al_(x)C_(y)N_(z)-Layers X-ray Full-width half- Elementary composition x in diffraction intensities* maximum according to EDX-analysis Ti_(1−x)Al_(x)C_(y)N_(z)* Micro- Coating I(111)/ of the 111- Lattice [atom-%]* according to hardness No I(111) I(200) I(200) Reflection [°]* constant a* Ti Al N C Cl EDX-analysis [HV_(0.05]) 1 (Inv) 2628 32 184 0.556 4.101 ± 0.007 12.3 31.9 55.1 0 0.7 0.72 ± 0.1 2750 2 (Inv) 1389 114 67 0.409 4.094 ± 0.014 10.5 35.1 54.2 0 0.2 0.77 ± 0.1 n.m.** 3 (Inv) 1738 21 136 0.414 4.080 ± 0.001 n.m. n.m. n.m. n.m. n.m. — n.m.** 4 (Inv) 5502 98 182 0.444 4.097 ± 0.011 10.6 34.6 54.6 0 0.2  0.77 ± 0.06 2939 5 (Inv) 2253 135 17 0.406 4.090 ± 0.009 n.m. n.m. n.m. n.m. n.m. — n.m.** 6 (Inv) 2635 85 38 0.411 4.084 ± 0.004  6.3 41   52.5 0 0.3  0.87 ± 0.01 n.m.** 7 (Inv) 3898 92 42 0.451 4.095 ± 0.009  8.8 37.1 51.7 2.3 0.1 0.81 ± 0.1 3040 8 (Comp) 120 2297 0.06 3.25 4.129 ± 0.004 16.8 26.1 55.5 0 1.6  0.61 ± 0.03 1800 *Average of measurements on 4 samples at different reactor positions **n.m. = not measured

TABLE 5 Blasting treatment and residual stress measurements of various coatings Residual stress prior Residual stress Blasting Blasting Blasting to blasting after blasting Coating spacing pressure duration [MPa] [MPa] Sample No Blasting agent [mm] [bar] [s] WC Ti_(1−x)Al_(x)C_(y)N_(z) WC Ti_(1−x)Al_(x)C_(y)N_(z) S1 2 Fused corundum 90 3 6 −1032 +1286 −997 −41 (280-320 mesh) S2 4 Fused corundum 90 3 6 −766 +884 −706 +167 (280-320 mesh) S3 2 Fused corundum 90 3 30 −1079 +1286 −156 −532 (280-320 mesh) S4 4 Fused corundum 90 3 30 −832 +793 −104 −418 (280-320 mesh) S5 5 Fused corundum 90 1.5 10 −113 +682 −3627 −3371 (Grain size 106-150 μm) S6 5 Fused corundum 90 2 30 −113 +682 −4062 −4378 (Grain size 106-150 μm) S7 4 SiC 90 1.5 24 −766 +833 −1876 −1392 (Grain size 45-75 μm) S8 5 ZrO₂ 90 4 20 −156 +598 −1096 −832 (Grain size 80-125 μm) S9 5 ZrO₂ 90 6.5 20 −209 +743 −883 −498 (Grain size 80-125 μm) Cutting Trials—Turning

Carbide indexable cutting bits of the geometry CNMAl20412 of a composition of 86.5 wt-% WC, 5.5 wt-% Co, 2 wt-% TiC, 6 wt-% (NbC+TaC) and with a mixed carbide-free edge zone were coated with the CVD coatings Nos 1 and 8 set forth in Table 3 and with the above-described coating No 9 (TiN/MT-Ti_(1-x)Al_(x)C_(y)N_(z) layer (C,N)/TiN). The total layer thickness for all tools was about 12 μm. Longitudinal turning machining operations were carried out with the cutting inserts, under the following cutting conditions:

-   Workpiece material: grey cast iron GG25 -   Cooling fluid: emulsion -   Feed: f=0.32 mm -   Cutting depth: a_(p)=2.5 mm -   Cutting speed: v_(c)=200 m/min.

FIGS. 1 to 3 show the cutting edges used of the indexable cutting bits after an engagement time of t=9 min. The two indexable cutting bits according to the state of the art (FIG. 1: coating 9; FIG. 2: coating 8) exhibit large-area spalling of the layer along the cutting edge. In the indexable cutting bit with the Ti_(1-x)Al_(x)C_(y)N_(z) layer according to the invention (FIG. 3: coating 1) scarcely any spalling is to be observed.

Cutting Trials—Milling (1)

Carbide indexable cutting bits of the geometry SEHW1204AFN of a composition of 90.47 wt-% WC, 8 wt-% Co and 1.53 wt-% TaC/NbC were coated with the CVD coatings Nos 4 and 8 set forth in Table 3. The total layer thickness in all tools was about 11 μm. Milling operations were performed under the following cutting conditions with the cutting inserts:

-   Workpiece material: spheroidal graphite cast iron GGG70 strength 680     MPa)     Co-directional, dry machining -   Tooth feed: f_(z)=0.2 mm -   Cutting depth: a_(p)=3 mm -   Cutting speed: v_(c)=185 m/min -   Setting angle: κ=45° -   Working engagement: a_(e)=98 mm -   Projection: u_(e)=5 mm.

Then the maximum wear mark width v_(B,max) was determined at the main cutting edge after 3200 m milling travel:

Wear mark width v_(B.max) Coating No [mm] 4 (Invention) 0.25 8 (State of the art): 0.35 Cutting Trials:—Milling (2)

Carbide indexable cutting bits of the geometry SEHW1204AFN of a composition of 90.47 wt-% WC, 8 wt-% Co and 1.53 wt-% TaC/NbC were coated with the CVD coating No 5 set forth in Table 3 and with the above-described coating No 10 (TiN/MT-Ti (C,N). Indexable cutting bits with coating No 5 were used on the one hand in the unblasted condition and on the other hand after a dry jet blasting treatment with ZrO₂ as the blasting agent in accordance with sample S8 in Table 5. Milling operations were carried out under the following cutting conditions with the cutting inserts:

-   Workpiece material: grey cast iron GGG70     Co-directional, dry machining -   Tooth feed: f_(z)=0.2 mm -   Cutting depth: a_(p)=3 mm -   Cutting speed: v_(c)=283 m/min -   Setting angle: κ=45° -   Working engagement: a_(e)=98 mm -   Projection: u_(e)=5 mm.

The mean wear mark width v_(B) and the number of comb cracks at the main cutting edge was then determined after 2400 m of milling travel.

Wear mark width v_(B) Coating No [mm] Comb cracks  5 unblasted (Invention) 0.05 3  5 blasted (Invention) 0.05 0 10 (State of the art): 0.10 8 Cutting Trials:—Milling (3)

Carbide indexable cutting bits of the geometry SEHW1204AFN of a composition of 90.47 wt-% WC, 8 wt-% Co and 1.53 wt-% TaC/NbC were coated with the CVD coating No 5 set forth in Table 3 and with the above-described coating No 10 (TiN/MT-Ti (C,N). Three cutting inserts were tested in respect of each coating variant. Milling operations were carried out under the following cutting conditions with the cutting inserts:

-   Workpiece material: structural steel ST37 (strength about 500 MPa)     Co-directional, dry machining -   Tooth feed: f_(z)=0.3 mm -   Cutting depth: a_(p)=6 mm -   Cutting speed: v_(c)=299 m/min -   Setting angle: κ=75° -   Working engagement: a_(e)=50 mm -   Projection: u_(e)=350 mm.

The number of comb cracks at the main cutting edge was then determined after 3200 m of milling travel:

Coating No Comb cracks  5 (Invention)-1 0  5 (Invention)-2 0  5 (Invention)-3 0 10 (State of the art)-1 4 10 (State of the art)-2 3 10 (State of the art)-3 3 

The invention claimed is:
 1. A process for the production of a tool having a base body of carbide, cermet, ceramic, steel or high speed steel and a single-layer or multi-layer wear-protection coating applied thereto in a CVD process, wherein the wear-protection coating has at least one Ti_(1-x)Al_(x)C_(y)N_(z) layer having stoichiometry coefficients 0.70<x<1, 0<y<0.25 and 0.75≤z<1.15 and of a thickness in the range of 1 μm to 25 μm, wherein for production of the Ti_(1-x)Al_(x)C_(y)N_(z) layer a) the bodies to be coated are placed in a substantially cylindrical CVD reactor designed for an afflux flow on the bodies to be coated with the process gases in a direction substantially radially relative to the longitudinal axis of the reactor, b) two precursor gas mixtures (VG1) and (VG2) are provided, wherein the first precursor gas mixture (VG1) contains 0.005% to 0.2 vol-% TiCl₄, 0.025% to 0.5 vol-% AlCl₃ and as a carrier gas hydrogen (H₂) or a mixture of hydrogen and nitrogen (H₂/N₂), and wherein the second precursor gas mixture (VG2) contains 0.1 to 3.0 vol-% of at least one N-donor selected from ammonia (NH₃) and hydrazine (N₂H₄), and as a carrier gas hydrogen (H₂) or a mixture of hydrogen and nitrogen (H₂/N₂), and wherein the first precursor gas mixture (VG1) and/or the second precursor gas mixture (VG2) optionally contains a C-donor selected from acetonitrile (CH₃CN), ethane (C₂H₆), ethene (C₂H₄) and ethyne (C₂H₂) and mixtures thereof, wherein the total vol-% proportion of N-donor and C-donor in the precursor gas mixtures (VG1, VG2) is in the range of 0.1 to 3.0 vol-%, c) the two precursor gas mixtures (VG1, VG2) are kept separate before passing into the reaction zone and are introduced substantially radially relative to the longitudinal axis of the reactor at a process temperature in the CVD reactor in the range of 600° C. to 850° C. and a process pressure in the CVD reactor in the range of 0.2 to 18 kPa, wherein the ratio of the volume gas flows ({dot over (V)}) of the precursor gas mixtures (VG1, VG2){dot over (V)}(VG1)/{dot over (V)}(VG2) is less than 1.5.
 2. A process according to claim 1, wherein the process includes at least one of: the process temperature in the CVD reactor is in the range of 650° C. to 800° C. and the process pressure in the CVD reactor is in the range of 0.2 to 7 kPa.
 3. A process according to claim 1, wherein the ratio of the volume gas flows ({dot over (V)}) of the precursor gas mixtures (VG1, VG2){dot over (V)}(VG1)/{dot over (V)}(VG2) is less than 1.25.
 4. A process according to claim 1, wherein the concentration of TiCl₄ in the precursor gas mixture (VG1) and the concentration of N-donor in the precursor gas mixture (VG2) are so set that the molar ratio of Ti to N in the volume gas flows {dot over (V)}(VG1) and {dot over (V)}(VG2) introduced into the reactor in stage c) is ≤0.25.
 5. A process according to claim 1, wherein the second precursor gas mixture (VG2) contains ≤1.0 vol-% of the N-donor.
 6. A process according to claim 1, wherein the N-donor is ammonia (NH₃).
 7. A process according to claim 1, wherein the wear-protection coating is subjected to a blasting treatment with a particulate blasting agent under conditions such that the Ti_(1-x)Al_(x)C_(y)N_(z) layer after the blasting treatment has residual stresses in the range of +300 to −5000 MPa.
 8. A tool having a base body of carbide, cermet, ceramic, steel or high speed steel and a single-layer or multi-layer wear-protection coating applied thereto in a CVD process, wherein the wear-protection coating includes at least one Ti_(1-x)Al_(x)C_(y)N_(z) layer having stoichiometry coefficients 0.70≤x<1, 0<y<0.25 and 0.75≤z<1.15, and wherein the Ti_(1-x)Al_(x)C_(y)N_(z) layer is of a thickness of 1 μm to 25 μm and has a crystallographic preferential orientation, which is characterised by a ratio of the intensities of the X-ray diffraction peaks of the crystallographic {111} plane and the {200} plane, wherein I{111}/I{200}>1+h (ln h)², wherein h is the thickness of the Ti_(1-x)Al_(x)C_(y)N_(z) layer in micrometers.
 9. A tool according to claim 8, wherein the full-width half-maximum (FWHM) of the X-ray diffraction peak of the {111} plane of the Ti_(1-x)Al_(x)C_(y)N_(z) layer is <1%.
 10. A tool according to claim 8, wherein the Ti_(1-x)Al_(x)C_(y)N_(z) layer has at least 90 vol-% Ti_(1-x)Al_(x)C_(y)N_(z) phase with a cubically face-centred (fcc) lattice.
 11. A tool according to claim 8, wherein the Ti_(1-x)Al_(x)C_(y)N_(z) layer has stoichiometry coefficients 0.70≤x<1, y=0 and 0.95≤z<1.15.
 12. A tool according to claim 8, wherein the Ti_(1-x)Al_(x)C_(y)N_(z) layer has a thickness in the range of 3 μm to 20 μm.
 13. A tool according to claim 8, wherein the ratio of the intensities of the X-ray diffraction peaks of the crystallographic {111} plane and the {200} plane of the Ti_(1-x)Al_(x)C_(y)N_(z) layer is >1+(h+3)x(ln h)².
 14. A tool according to claim 8, wherein the Ti_(1-x)Al_(x)C_(y)N_(z) layer has a Vickers hardness (HV)>2300 HV.
 15. A tool according to claim 8, wherein the wear-protection coating includes at least one of: arranged between the base body and the Ti_(1-x)Al_(x)C_(y)N_(z) layer, at least one layer selected from a TiN layer, a TiCN layer deposited by means of high temperature CVD (CVD) or medium temperature CVD (MT-CVD), an Al₂O₃ layer and combinations thereof, and arranged over the Ti_(1-x)Al_(x)C_(y)N_(z) layer, at least one hard material layer.
 16. A tool according to claim 8, wherein an absolute maximum, measured radiographically or by means of EBSD, of the diffraction intensity of the crystallographic {111} planes of the fcc Ti_(1-x)Al_(x)C_(y)N_(z) layer is within an angle range of α=±10°, starting from the normal direction of the sample surface.
 17. A tool including a base body of carbide, cermet, ceramic, steel or high speed steel and a single-layer or multi-layer wear-protection coating applied thereto in a CVD process, wherein the wear-protection coating includes at least one Ti_(1-x)Al_(x)C_(y)N_(z) layer having stoichiometry coefficients 0.70<x<1, 0<y<0.25 and 0.75<z<1.15, and wherein the Ti_(1-x)Al_(x)C_(y)N_(z) layer is of a thickness of 1 μm to 25 μm and has a crystallographic preferential orientation, which is characterised by a ratio of the intensities of the X-ray diffraction peaks of the crystallographic {111} plane and the {200} plane, wherein l{111}/l{200}>1+h (ln h)², wherein h is the thickness of the Ti_(1-x)Al_(x)C_(y)N_(z) layer in micrometers, produced according to claim
 1. 18. A process according to claim 2, wherein the process includes at least one of: the process temperature in the CVD reactor is in the range of 657° C. to 750° C. and the process pressure in the CVD reactor is in the range of 0.4 to 1.8 kPa.
 19. A process according to claim 5, wherein the second precursor gas mixture (VG2) contains <0.6 vol-% of the N-donor.
 20. A process according to claim 7, wherein the Ti_(1-x)Al_(x)C_(y)N_(z) layer after the blasting treatment has residual stresses in the range of −1 to −3500 MPa.
 21. A tool according to claim 9, wherein the full-width half-maximum (FWHM) of the X-ray diffraction peak of the {111} plane of the Ti_(1-x)Al_(x)C_(y)N_(z) layer is <0.6%.
 22. A tool according to claim 10, wherein the Ti_(1-x)Al_(x)C_(y)N_(z) layer has at least 98 vol-% Ti_(1-x)Al_(x)C_(y)N_(z) phase with a cubically face-centred (fcc) lattice.
 23. A tool according to claim 14, wherein the Ti_(1-x)Al_(x)C_(y)N_(z) layer has a Vickers hardness (HV) in the range of 2750 HV to 3040 HV.
 24. A tool according to claim 15, wherein the at least one hard material layer arranged over the Ti_(1-x)Al_(x)C_(y)N_(z) layer includes at least one Al₂O₃ layer of the modification γ-Al₂O₃, κ-Al₂O₃ or α-Al₂O₃, and wherein the Al₂O₃ layer is deposited by means of high temperature CVD (CVD) or medium temperature CVD (MT-CVD).
 25. A tool according to claim 16, wherein an absolute maximum, measured radiographically or by means of EBSD, of the diffraction intensity of the crystallographic {111} planes of the fcc Ti_(1-x)Al_(x)C_(y)N_(z) layer is within an angle range of α=±5°, starting from the normal direction of the sample surface. 